用于高性能数字超声传感器的InP基板MEMS麦克风

2013 IEEE International Meeting for Future of Electron Devices, Kansai Pub Date : 2013-06-05 DOI:10.1109/IMFEDK.2013.6602256

S. Fujino, Yuta Mizuno, K. Takaoka, M. Mori, K. Maezawa

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引用次数: 0

摘要

本文介绍了在InP衬底上制造MEMS传声器的工艺。该工艺是基于臭氧灰化光刻胶来制造空心结构。该工艺被证明是无损伤的，适合与hemt集成。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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MEMS microphones on InP substrates for high performance digital ultrasonic sensors

This paper describes the fabrication process of the MEMS microphones on InP substrates. The process is based on ozone ashing of the photoresist to fabricate a hollow structure. This process was demonstrated to be damage-free, and suitable for integration with HEMTs.

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来源期刊

2013 IEEE International Meeting for Future of Electron Devices, Kansai

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