大角偏转旋转静电硅反射镜的制造、仿真与实验

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI:10.1109/MEMSYS.2000.838594

H. Camon, F. Larnaudie

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引用次数: 36

摘要

在本文中，我们提出了一种能够在相对较高的频率(1khz)下倾斜高达/spl + /20/spl度的大块微机械硅微镜的完整研究。这些由特定电极驱动的结构也可以用作高达35/spl度/的数字微镜。他们的行为已经测试在静态和频率响应方面。在很大的角度上观察到非线性现象。报道了微观组织质量因子的压力依赖性。寿命方面也经过了测试。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Fabrication, simulation and experiment of a rotating electrostatic silicon mirror with large angular deflection

We propose in this paper the complete study of a bulk micromachined silicon micromirror able to tilt up to /spl plusmn/20/spl deg/ at a relatively high frequency (1 kHz). These structures actuated with particular electrodes could be also used as a digital micromirror up to 35/spl deg/. Their behaviours have been tested in term of static and frequency responses. A non-linear phenomenon has been observed at very large angle. The pressure dependence of the quality factor of the microstructure is reported. Lifetime aspect has also been tested.

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Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)

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