一种用于主动减阻的晶圆级MEMS和模拟VLSI系统

B. Gupta, R. Goodman, F. Jiang, T. Tsao, Y. Tai, S. Tung, Chih-Ming Ho
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引用次数: 2

摘要

我们描述了一个模拟CMOS VLSI系统,该系统可以处理来自集成剪应力传感器的实时信号,以检测气流中沿表面的高剪应力区域。CMOS电路的输出控制集成微机械襟翼的驱动,目的是减少表面上的高剪切应力,从而降低总阻力。我们已经在层流和湍流两种气流状态下的风洞中设计、制造和测试了该系统的组件,目标是建立一个晶圆规模的系统。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A wafer-scale MEMS and analog VLSI system for active drag reduction
We describe an analog CMOS VLSI system that can process real-time signals from integrated shear stress sensors to detect regions of high shear stress along a surface in an airflow. The outputs of the CMOS circuit control the actuation of integrated micromachined flaps with the goal of reducing this high shear stress on the surface and thereby lowering the total drag. We have designed, fabricated, and tested components of this system in a wind tunnel in both laminar and turbulent flow regimes with the goal of building a wafer-scale system.
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