焊盘结构对铜丝焊盘/低k层应力影响的动态研究

Y. B. Yang, N. Kumar, D. John, R. Hyman, F. Clive, S. Nathapong, William G. Ramroth
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引用次数: 7

摘要

近年来,许多OSAT(外包半导体组装和测试)公司开始探索铜线键合工艺,这被认为能够降低IC封装成本。铜线也表现出更好的电气性能,特别是细线。然而,可靠性维护并不像金线那么容易。有些公司的铜线虽然在工程阶段是合格的,但在批量生产中遇到了很多问题。本文试图了解粘结垫设计对垫应力以及低K层应力的影响。本文提出了一种轴对称暂态非线性动力有限元分析方法,以帮助理解铜丝键合过程。在建模中,只关注了键合垫结构的铝垫层和低k层。选取4种键合垫结构,从铝垫表面到芯片低k层进行应力比较。首先,用我们的标准毛细管设计和粘结垫在不同阶段对Al垫层和低K层的应力进行了研究。然后将毛细管内倒角从50°变化到120°,观察其影响。最后,给出了4种键合垫结构进行比较。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A dynamic study of pad structure impact on bond pad/low-K layer stress in copper wire bond
In recent years, many OSAT (Outsourced Semiconductor Assembly and Test) companies start to explore copper wire bond process, which is believed to be able to reduce the IC packaging cost. Copper wire also shows better electrical performance especially for fine wire. However, the reliability maintenance is not as easy as gold wire. Some companies encountered numerous problems in mass production although the copper wire is qualified in engineering stage. This paper is an attempt to understand the bond pad design impact on pad stress as well as the low K layer stress. In this paper, an axisymmetric transient nonlinear dynamic finite element analysis is developed to assist the understanding of copper wire bond process. In the modeling, only Aluminum pad and low-K layers of the bond pad structure are focused. 4 bond pad structures are selected for the stress comparison from Aluminum pad surface to chip low-K layer. Firstly, the stress on Al pad and low K layer is studied with our standard capillary design and bond pad at different stage. Then the capillary inner chamfer angle is varied from 50° to 120 ° to see the impact. Lastly, 4 bond pad structures are presented for comparison.
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