先进的铜线粘接技术

H. Ho
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引用次数: 1

摘要

线键合是微电子技术中最主要的一级芯片互连形式,在过去的几十年里,金线键合一直处于领先地位。今天,很明显,由于黄金价格的飙升和铜线粘合技术的最新发展,从黄金到铜线粘合的转变正在真正加快。课程将分为两个主要部分:-1。第一部分将讨论技术趋势、铜线键合的构建模块、实现可靠铜线键合的关键工艺因素,以及与下游工艺(如与模具化合物的相互作用及其封装可靠性方面)的实施挑战。2. 第二部分将讨论设备,铜线材料和毛细管的最新发展,以及这些如何帮助在生产实施中实现铜线粘合,以及如何缩短金和铜线粘合之间的差距。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Advanced copper wire bonding technology
Wire bonding is the most dominant form of first-level chip interconnects in microelectronics with gold wire bonding taking the lead for the past few decades. Today, it is evident that the shift from gold to copper wire bonding is genuinely picking up, due to both a surge in gold prices and recent developments in copper wire bonding technology. The course will be divided into two main sections:-1. The first section would discuss the technology trends, the building blocks for copper wire bonding, the key process factors to achieve a reliable copper wire bond and what are the implementation challenges with downstream processes such as interaction with mold compound and its package reliability aspects. 2. The second section would discuss the recent developments in equipment, copper wire material and capillary and how these help realize copper wire bonding in production implementation and how the gaps between gold and copper wire bonding are shorten.
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