用于振动能量采集的基于aln的MEMS器件

2011 Proceedings of the European Solid-State Device Research Conference (ESSDERC) Pub Date : 2011-10-13 DOI:10.1109/ESSDERC.2011.6044220

A. Bertacchini, S. Scorcioni, D. Dondi, L. Larcher, P. Pavan, M. Todaro, A. Campa, G. Caretto, S. Petroni, A. Passaseo, M. de Vittorio

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引用次数: 20

摘要

本文提出了一种适用于振动能量采集的新型aln基MEMS器件。由于其特殊的形状，与传统悬臂梁不同，传统悬臂梁只有在适当的方向上受到刺激才能有效地收集能量，因此所提出的设备具有3D生成能力，解决了实际应用中设备方向和放置的问题。由于其特殊的形状，所实现的器件在500 Hz至1.5 kHz范围内具有多个基本谐振频率，单个MEMS器件的电压产生高于300μV，输出功率高达0.4 pW。

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AlN-based MEMS devices for vibrational energy harvesting applications

This paper presents a new AlN-based MEMS devices suitable for vibrational energy harvesting applications. Due to their particular shape and unlike traditional cantilever which efficiently harvest energy only if subjected to stimulus in the proper direction, the proposed devices have 3D generation capabilities solving the problem of device orientation and placement in real applications. Thanks to their particular shape, the realized devices present more than one fundamental resonance frequencies in a range comprised between 500 Hz and 1.5 kHz, with a voltage generation higher than 300μV and an output power up to 0.4 pW for single MEMS device.

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2011 Proceedings of the European Solid-State Device Research Conference (ESSDERC)

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