倒装片焊锡球蠕变应变的测量与模拟

F. Schindler-Saefkow, F. Rost, S. Rzepka
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引用次数: 0

摘要

本文报道了利用IForce应力芯片对倒装焊料球在4点弯曲试验中的蠕变行为进行了原位表征。应力芯片技术可以测量硅片表面的机械应力。在倒装芯片结构中,焊料球距离应力芯片的n-和p-MOS电流镜像单元只有几微米远。因此,焊料球的松弛会直接对这些传感器单元产生可测量的影响。倒装芯片应力芯片的4点弯曲证明了这一点。通过考虑和不考虑蠕变材料参数的仿真验证了该方法的有效性。对最靠近焊锡球的应力单元内的弛豫进行时间相关分析,可以从测量结果中推断出弛豫特性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Measurements and Simulations of the Creep Strain in Flip Chip Solder Balls
The paper reports the in-situ characterization of the creep behavior of flip chip solder balls during 4 point bending test by means of the IForce stress chip. The stress chip technology can measure mechanical stress at the surface of the silicon die. In flip chip configuration, the solder balls are only a few micrometer away from the n-and p-MOS current mirror cells of the stress chip. Hence, relaxation in the solder balls should directly cause measurable effects in these sensor cells. This is demonstrated by 4-point-bending of the flip chip stress chips. A simulation with and without creep material parameter proves the validity of the approach. A time-dependent analysis of the relaxation within the stress cell closest to the solder ball allows the deduction of the relaxation properties from the measurement.
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