倒装芯片后端设计参数,减少碰撞电迁移

S. Karajgikar, V. Nagaraj, D. Agonafer, S. Pekin
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引用次数: 3

摘要

倒装芯片技术的进步使我们能够满足更小的芯片尺寸以及增加的功能的要求。由于倒装芯片封装技术的发展以及对焊料凸点的更高载流要求,电迁移现在已经成为一个可靠性问题。本文采用市售的有限元工具,研究不同后端设计参数下共晶凸点电流密度的分布。对钝化孔(PO)直径、痕迹宽度、凹凸冶金(UBM)厚度和UBM直径等参数进行了详细研究。结果在0.1 A和0.5 A的输入电流下进行了评估。在此基础上,提出了凸点结构的指导原则。在金属化过程中,最重要的设计属性是铝径宽度。在钎料凸点中,发现最重要的参数是Al迹宽度和UBM厚度。在我们研究中使用的金属化结构中,电流密度分别在0.1和0.5 A时从5倍105 A/cm2变化到7倍105 A/cm2,从2.5倍106 A/cm2变化到3.5倍106 A/cm2。在我们研究中使用的结构焊料中,电流密度分别从2.8倍103 A/cm2变化到4.2倍104 A/cm2,从1.4倍104和2.1倍105 A/cm2变化到0.1和0.5 A/cm2。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Flip chip back end design parameters to reduce bump electromigration
The advancement in flip chip technology has enabled us to meet the requirement of smaller die size along with the increased functionality. Due to this development in flip chip packaging technology along with higher current carrying requirement of solder bumps, electromigration has now become a reliability concern. In this paper, a commercially available finite element tool is adopted in order to study the distribution of current density in eutectic solder bump for variety of back end design parameters. Parameters such as passivation opening (PO) diameter, trace width, under bump metallurgy (UBM) thickness and UBM diameter were studied in detail. The results were evaluated for input currents of 0.1 A and 0.5 A. Based on the results, a guideline for solder bump configuration is proposed. In the metallization, the most important design attribute found is the Al trace width. In the solder bump, the most important parameters found are Al trace width and UBM thickness. In the metallization of the structures used in our study, current density varied from 5times105 A/cm2 to 7times105 A/cm2 and from 2.5times106 A/cm2 to 3.5times106 A/cm2 at 0.1 and 0.5 A per bump, respectively. In the solder of the structures used in our study, current density varied from 2.8times103 A/cm2 to 4.2times104 A/cm2 and from 1.4times104 and 2.1times105 A/cm2 at 0.1 and 0.5 A per bump, respectively.
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