在白橡树半导体实施最先进的过程控制和工厂自动化解决方案

10th Annual IEEE/SEMI. Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings (Cat. No.99CH36295) Pub Date : 1999-09-08 DOI:10.1109/ASMC.1999.798192

T. Urenda, T. Dowd, K. Dimond, B. Schulze

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引用次数: 0

摘要

本文介绍了SEMY Engineering, Inc.和White Oak Semiconductor的合作伙伴关系，通过专有和商用软件系统的组合，成功地提供自动化和先进过程控制(APC)解决方案。White Oak工厂的目标是实施计算机集成制造(CIM)系统，为产量分析和过程控制提供所有必要数据的全部可用性。使用这种实现，White Oak的半导体生产吞吐量和可靠性显著提高。仅在第一年，光刻单元就实现了巨大的投资回报率(>500%)。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Implementing state of the art advanced process control and factory automation solutions at White Oak Semiconductor

This paper describes the partnership SEMY Engineering, Inc. and White Oak Semiconductor formed to successfully provide automation and advanced process control (APC) solutions from a combination of proprietary and commercially available software systems. The White Oak factory objective was to implement a computer integrated manufacturing (CIM) system providing full availability of all necessary data for yield analysis and process control. Semiconductor production throughput and reliability at White Oak has significantly increased using this implementation. A large ROI (>500%) has already been realized in the lithography cell in the first year alone.

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10th Annual IEEE/SEMI. Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings (Cat. No.99CH36295)

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