带有印刷栅电极的有机薄膜晶体管

U. Zschieschang, H. Klauk, M. Halik, G. Schmid, W. Radlik, W. Weber
{"title":"带有印刷栅电极的有机薄膜晶体管","authors":"U. Zschieschang, H. Klauk, M. Halik, G. Schmid, W. Radlik, W. Weber","doi":"10.1109/POLYTR.2002.1020209","DOIUrl":null,"url":null,"abstract":"We have fabricated pentacene thin film transistors on flexible polymeric substrates with gate electrodes prepared using a combination of microcontact printing and selective electroless plating of nickel. These transistors also employ a spin-coated polymer gate dielectric layer patterned by photolithography and dry etching and have a carrier mobility of 0.03 cm/sup 2//V-s, comparable to pentacene transistors with vacuum-deposited gate electrodes. For comparison, we have also fabricated pentacene devices on silicon substrates and obtained carrier mobility as large as 1.3 cm/sup 2//V-s, demonstrating the potential of pentacene thin film transistors for low-cost electronic applications.","PeriodicalId":166602,"journal":{"name":"2nd International IEEE Conference on Polymers and Adhesives in Microelectronics and Photonics. POLYTRONIC 2002. Conference Proceedings (Cat. No.02EX599)","volume":"55 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-08-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":"{\"title\":\"Organic thin film transistors with printed gate electrodes\",\"authors\":\"U. Zschieschang, H. Klauk, M. Halik, G. Schmid, W. Radlik, W. Weber\",\"doi\":\"10.1109/POLYTR.2002.1020209\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We have fabricated pentacene thin film transistors on flexible polymeric substrates with gate electrodes prepared using a combination of microcontact printing and selective electroless plating of nickel. These transistors also employ a spin-coated polymer gate dielectric layer patterned by photolithography and dry etching and have a carrier mobility of 0.03 cm/sup 2//V-s, comparable to pentacene transistors with vacuum-deposited gate electrodes. For comparison, we have also fabricated pentacene devices on silicon substrates and obtained carrier mobility as large as 1.3 cm/sup 2//V-s, demonstrating the potential of pentacene thin film transistors for low-cost electronic applications.\",\"PeriodicalId\":166602,\"journal\":{\"name\":\"2nd International IEEE Conference on Polymers and Adhesives in Microelectronics and Photonics. POLYTRONIC 2002. Conference Proceedings (Cat. No.02EX599)\",\"volume\":\"55 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2002-08-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"6\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2nd International IEEE Conference on Polymers and Adhesives in Microelectronics and Photonics. POLYTRONIC 2002. Conference Proceedings (Cat. No.02EX599)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/POLYTR.2002.1020209\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2nd International IEEE Conference on Polymers and Adhesives in Microelectronics and Photonics. POLYTRONIC 2002. Conference Proceedings (Cat. No.02EX599)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/POLYTR.2002.1020209","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 6

摘要

我们在柔性聚合物衬底上制备了并五苯薄膜晶体管,其栅极采用微接触印刷和选择性化学镀镍相结合的方法制备。这些晶体管还采用光刻和干蚀刻的自旋涂覆聚合物栅极介电层,载流子迁移率为0.03 cm/sup 2//V-s,与真空沉积栅极的并五苯晶体管相当。相比之下,我们还在硅衬底上制造了并五苯器件,并获得了高达1.3 cm/sup 2//V-s的载流子迁移率,证明了并五苯薄膜晶体管在低成本电子应用中的潜力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Organic thin film transistors with printed gate electrodes
We have fabricated pentacene thin film transistors on flexible polymeric substrates with gate electrodes prepared using a combination of microcontact printing and selective electroless plating of nickel. These transistors also employ a spin-coated polymer gate dielectric layer patterned by photolithography and dry etching and have a carrier mobility of 0.03 cm/sup 2//V-s, comparable to pentacene transistors with vacuum-deposited gate electrodes. For comparison, we have also fabricated pentacene devices on silicon substrates and obtained carrier mobility as large as 1.3 cm/sup 2//V-s, demonstrating the potential of pentacene thin film transistors for low-cost electronic applications.
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