在硅光泄漏器中使用连续部分传输的微机械VOA的光学特性

IEEE/LEOS International Conference on Optical MEMs Pub Date : 2002-11-07 DOI:10.1109/OMEMS.2002.1031438

Sungsik Yun, Young Yun Kim, Ho Nam Kown, Won Hyo Kim, Jong Hyan Lee, Yeong-Gyu Lee, Sungcheon Jung

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引用次数: 11

摘要

提出了一种采用楔形硅光泄漏器阻挡并连续耗散光信号的新型微机械VOA。该器件具有-38 B的大衰减范围，-40 dB的回波损耗和低成本，因为没有麻烦的侧壁金属化。

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Optical characteristics of a micromachined VOA using successive partial transmission in a silicon optical leaker

Presents a new micromachined VOA with a wedge-shaped silicon optical leaker blocking and successively dissipating optical signal. This device features large attenuation range of -38 B, return loss of -40 dB and low cost owing to no troublesome sidewall metallization.

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IEEE/LEOS International Conference on Optical MEMs

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