纳米探针作为纳米器件诊断工具的应用

2007 14th International Symposium on the Physical and Failure Analysis of Integrated Circuits Pub Date : 2007-07-11 DOI:10.1109/IPFA.2007.4378057

S. Toh, Z. Mai, P. K. Tan, E. Hendarto, H. Tan, Q.F. Wang, J.L. Cai, Q. Deng, T. H. Ng, Y. W. Goh, J. Lam, L. Hsia

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引用次数: 9

摘要

纳米探测在纳米区域产生节点的失效分析(FA)中起着至关重要的作用，因为它能够检测故障部位并表征故障器件的电气行为，从而更好地理解故障机制。它还为确定故障原因所需的物理分析提供了指导。这种建立在局部区域的电气故障分析(EFA)方法有助于加速故障分析。本文重点介绍了它在一些前端问题上的应用。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Use of Nanoprobing as the Diagnostic Tool for Nanoscaled Devices

Nanoprobing plays a crucial role for failure analysis (FA) in the nanometer-region generation nodes by having the capability to detect the failure sites and characterize the electrical behaviour of malfunctional devices for better understanding of the failure mechanisms. It also offers a guide to the necessary physical analysis in identifying the cause of failure. This established electrical failure analysis (EFA) methodology at a localized area helps to accelerate the FA. Its application to few of the front-end issues is highlighted in the paper.

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2007 14th International Symposium on the Physical and Failure Analysis of Integrated Circuits

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