双概率参数随机游走模型的零通量边界条件

International Conference on Simulation of Semiconductor Processes and Devices, 2003. SISPAD 2003. Pub Date : 2003-09-29 DOI:10.1109/SISPAD.2003.1233650

M. Orlowski

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引用次数: 0

摘要

在双概率参数和严格组合模型的背景下，重新讨论了零通量边界条件。双参数模型区分了部分偏析、部分吸收和部分反射。两种模型都表明，当掺杂剂分布在边界处的梯度不为零时，可以实现消能。

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Zero-flux boundary condition in a two-probability-parameter random walk model

Zero-flux boundary condition is revisited in the context of a two-probability-para meter and a rigorous combinatorial model. The two-parameter model distinguishes partial segregation, partial absorption, and partial reflection. Both models show that vanishing flux across the barrier can be realized for non-zero gradient of the dopant distribution at the boundary.

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International Conference on Simulation of Semiconductor Processes and Devices, 2003. SISPAD 2003.

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