多芯片嵌入式晶圆级封装(EMWLP)压缩成型过程的模流研究

D. V. Sorono, Ji Lin, C. T. Chong, S. Chong, S. Vempati
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引用次数: 4

摘要

嵌入式晶圆级封装(EMWLP)由于其在系统级集成方面的优势、更小的外形尺寸和灵活性,其需求迅速增长,导致了重构晶圆级封装的发展。用环氧树脂模塑复合材料对重构硅片进行压缩成型封装。由于EMWLP的高级应用,需要在单个封装中使用具有不同布局的多个芯片。然后,整个重建晶圆设计变得复杂,最终导致晶圆内的芯片布局不对称。压缩成型过程中,由于模具复合流动不平衡导致填充不完全,是多芯片重构晶圆成型的主要挑战之一。针对EMWLP多片布局压缩成型过程中实际的模具复合流动进行了研究。利用ANSYS Poly flow/Fluent软件对不同的多芯片布局进行了模流研究,结果表明,不对称的芯片布局存在模流响应不平衡的问题。然后,通过在不同的充模阶段进行有意的短射,将模流模拟的结果与压缩成型过程中的实际模具复合流进行比较。在实际成型过程中,由于切屑布局不对称,导致充型不平衡。与窄间隙区域相比,宽间隙区域成型化合物的流动速度更快。这表明,在压缩成型过程中,切屑布局决定了实际的模具复合流动。通过将切屑重新排列成对称布局,实现了平衡的模具复合流。此外,本文还表明,通过将点胶模式改为椭圆形,在不对称切屑布局下的实际模具复合流变得平衡。通过模具复合流试验验证了不同切屑布局下的模流模拟结果。仿真和实验结果表明,切屑布局和模具复合材料点胶方式对获得优异的成型质量效果至关重要。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Study on mold flow during compression molding for embedded wafer level package (EMWLP) with multiple chips
The rapidly increasing demand of embedded wafer level package (EMWLP) due to its advantages, smaller form factor and flexibility in system level integration leads to the development of reconstructed wafer level encapsulation. The reconstructed wafers are encapsulated with epoxy molding compound using compression molding. Due to EMWLP advanced applications, there is a need to use multi chips with different layout in a single package. The overall reconstructed wafer design then became complex that eventually leads to asymmetrical chips layout within the wafer. One major challenge in molding of reconstructed wafer with multi-chip layout was the incomplete filling due to imbalance mold compound flow during compression molding. This study was conducted to determine the actual mold compound flow during compression molding of EMWLP with multi chips layout. Mold flow studies has been carried out on different multi-chip layouts using ANSYS Poly flow/Fluent software and results revealed that asymmetrical chips layout had imbalance mold flow response. The result of the mold flow simulation was then compared to the actual mold compound flow during compression molding by performing intentional short shots at different mold filling stages. It was confirmed that actual molding with asymmetrical chips layout also resulted to unbalance mold filling. The flow of the molding compound in areas with wider gaps was faster compared to areas with narrow gaps. This suggests that the chips layout determines the actual mold compound flow during compression molding. Balanced mold compound flow was achieved by re-arranging the chips into a symmetrical layout. In addition, this paper also shows that by changing the dispensing pattern to oval shape, the actual mold compound flow on asymmetrical chips layout became balanced. The mold flow simulation results with different chips layout were validated with experimental mold compound flow tests. The simulation and experimental results revealed that the chips layout and mold compound materials dispensing pattern are critical to achieve excellent molding quality results.
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