BEOL过程中随时间介电击穿加速行为的变化:主要降解机制中氢诱导转变的指示

2005 IEEE International Reliability Physics Symposium, 2005. Proceedings. 43rd Annual. Pub Date : 2005-04-17 DOI:10.1109/RELPHY.2005.1493118

T. Pompl, K. Allers, R. Schwab, K. Hofmann, M. Röhner

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引用次数: 20

摘要

在线后端(BEOL)过程中进行一次修改就可以改变时变介质击穿的加速行为。根据e -模型和1/ e模型，证明了两种竞争退化机制并行存在，它们遵循时间依赖关系。负偏置温度不稳定性(NBTI)测试与TDDB结果有很好的相关性。介绍了一个能解释实验结果的连续氢反应模型。

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Change of acceleration behavior of time-dependent dielectric breakdown by the BEOL process: indications for hydrogen induced transition in dominant degradation mechanism

One single modification in the back end of line (BEOL) process can change the acceleration behavior of time-dependent dielectric breakdown (TDDB). It is demonstrated that two competing degradation mechanisms exist in parallel, which follow time dependences according to the E-model and the 1/E-model. Negative bias temperature instability (NBTI) tests correlate well with TDDB results. A continuous hydrogen reaction model is introduced, which can explain the experimental results.

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2005 IEEE International Reliability Physics Symposium, 2005. Proceedings. 43rd Annual.

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