2005 IEEE International Reliability Physics Symposium, 2005. Proceedings. 43rd Annual.

2005 IRPS Tutorial program

Pub Date : 2008-07-09 DOI: 10.1109/RELPHY.2008.4559022 Yuan Chen

V/sub ox//E/sub ox/-driven breakdown of ultra-thin SiON gate dielectric in p+gate-pMOSFET under low stress voltage of inversion mode

Pub Date : 2005-04-17 DOI: 10.1109/RELPHY.2005.1493114 S. Tsujikawa, K. Shiga, H. Umeda, Y. Akamatsu, J. Yugami, Y. Ohno, M. Yoneda

Physical mechanism of high resistance of tungsten plug as a root cause of low yield and reliability issue in deep-sub-micron Si technology

Pub Date : 2005-04-17 DOI: 10.1109/RELPHY.2005.1493172 W. Zhang, K. T. Tan