高集成度聚合物厚膜技术的新进展

M. Luniak, K. Wolter
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引用次数: 0

摘要

创新电子设备的发展特点是对功能、进一步小型化、高可靠性和同时降低制造成本的要求越来越高。聚合物厚膜技术(PTF)在提高打印分辨率和电导率方面的研究显示了其在微电子领域的应用潜力。自20世纪50年代以来,聚合物厚膜技术在电子电路生产中得到了应用。它主要用于生产节省成本的混合电路。然而,过去使用的材料在热性能和迁移行为方面不符合现在通用的规范。现在对分辨率、材料清洁度和可靠性的要求不太可能更高。因此,介绍了该技术的不同材料和工艺。特别介绍了银颗粒填充聚合物浆料的丝网印刷。而厚膜电路的最小线宽为120…10年前是200毫米,现在能够将线宽减少到100毫米以下。但是对于晶圆级封装来说,间距小于120 μ m的线宽是必要的,因为对芯片连接数量的要求总是不断增加。今天,我们已经发现线路分辨率小于30微米的厚膜电路。通过一个额外的工艺步骤,不仅可以提高这种印刷结构的导电性,而且可以提高其可靠性。采用各种方法测定表面形貌、抗剪强度和电气参数(方电阻、阻抗和载流能力)。在聚合物浆料的细线丝网印刷中进行的研究表明,通常用于晶圆级再分配的薄膜技术可以在低成本应用中被取代。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
New developments for highest integration density in Polymer Thick-film Technology
The development of innovative electronic devices is characterized by increasing demands with respect to functionality, further miniaturization, high reliability and simultaneously lower manufacturing costs. The study of Polymer Thick-film Technology (PTF) regarding improvements in print resolution and conductivity demonstrates its potential for an application in microelectronics. Polymeric thick-film technology is implemented in the production of electronic circuits since the 50psilas. It was primarily used in the production of cost saving hybrid circuits. However the used materials in the past did not match the now common specifications regarding thermal properties and migration behaviour. Now the requirements regarding resolution, material cleanness and reliability are unlikely higher. Therefore different materials and processes of this technology are described. Particularly the screen-printing of polymer pastes filled with silver particles is characterized. While the minimal line width of thick-film circuits was 120...200 mum 10 years ago, one now is capable to reduce line width to fewer than 100 mum. But line widths with a pitch fewer than 120 mum are necessary for a wafer level package because of always increasing requirements regarding the number of chip connections. Today we already find thick-film circuits with line resolutions smaller than 30 mum. With an additional process step not only the conductivity but also the reliability of such printed structures can be improved. Surface topography, shear strength and electrical parameters (square resistance, impedance and current carrying capacity) were determined using various methods. The conducted studies in fine-line screen-printing of polymer pastes could demonstrate that the normally used thin-film technology for wafer level redistribution can be replaced in low-cost applications.
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