Quantile – Quantile Fitting Approach to Detect Site to Site Variations in Massive Multi-site Testing

Multi-site testing saves test time and tests cost by screening multiple chips at once. However, it comes with its issues. As test engineers increase the number of sites on each tester to further save test time and cost, variations are now being observed in measurements from site to site which do not correspond to actual problems in the devices under test. Thus, a cost-effective way to investigate site to site variations and identify sites with issues needs to be developed to ensure high test quality and to rule out possible problems arising from the test hardware. In this paper, regression fitting on a quantile-quantile curve is used to compare the distribution of each site to a theoretical and expected distribution. This is shown to pronounce site to site variations inherent in test data, hence identifying issue-ridden sites with ease. The quantile-quantile plot compares the integrals of two probability density functions in a single plot, thus capturing the location, scale, and skewness of the test data set. This method provides more information to the test engineer than classical statistical methods that rely on single test statistics for distribution comparison and is at no extra cost.