超高压应力持续时间下的细铜线:裂纹破坏机制表征

R. E. Vaion, A. Mancaleoni, L. Cola, M. De Tornasi, P. Zabberoni
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引用次数: 1

摘要

从可靠性的角度来看,特定汽车应用的任务概况要求越来越高。将这些具有挑战性的要求转化为可靠性目标,意味着要进行更长时间的试验,或者使用更加速的条件(提高温度或电压等)。本研究的重点是了解铝衬垫上的细铜线在高温下(超过5000hrs @150°C)的破坏机制和特征。超过AEC-Q100 1级(1000hrs @150°C)[1]和AEC-Q006 (2000hrs @150°C)[2]规定的铜线条件,可以观察到Cu/Al结合系统所经历的等温应力的影响,直到其磨损。这种临界条件通常会激活在标准资格中无法明显观察到的失效机制。在高温下1000小时后,Cu球与CuxAlx IMC(金属间化合物)之间的裂纹从球边缘向球中心扩展,影响了所有的键合区域并导致了开放接触。裂纹扩展被评价为IMC生长和演化的二阶效应,因此裂纹的出现可由Arrhenius定律预测。根据实验数据估计了故障率预测的活化能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Thin copper wire under extreme HTSL stress duration: Crack failure mechanism characterization
Mission profiles for specific automotive applications are becoming more and more demanding from the reliability point of view. Translating this challenging requirements into reliability targets, it means performing trials for longer duration, or using more accelerated conditions (increasing temperature or voltage, etc…). This study is focused on the understanding of the failure mechanism and the characterization of a thin copper wire over Aluminum pad submitted to a very long stress duration at high temperature: more than 5000hrs @150°C. Going beyond AEC-Q100 Grade 1 (1000hrs @150°C) [1] and AEC-Q006 (2000hrs @150°C) [2] specified conditions for copper wires, it has been possible to observe the effects of the isothermal stress experienced by the Cu/Al bonding system, up to its wear out. Such critical conditions often activate failure mechanisms not significantly observable in standard qualifications. After thousand hours at high temperature a crack between Cu ball and CuxAlx IMC (Inter-Metallic Compounds) propagates from the ball edge to the ball center, affecting all the bonding area and causing an open contact. Crack propagation has been evaluated as second order effect of IMC growth and evolution, so its appearing is predictable by the Arrhenius law. The activation energy for the failure rate prediction has been estimated from the experimental data.
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