{"title":"测定金属膜厚度和金属线截面积的电学方法","authors":"H. Schafft, S. Mayo, S. Jones, J. Suehle","doi":"10.1109/IRWS.1994.515820","DOIUrl":null,"url":null,"abstract":"The electrical thickness of an aluminum-alloy metallization can be determined from resistance measurements of a van der Pauw cross structure at two temperatures, with corrections for the deviation from Matthiessen's rule and for thermal expansion. Thickness determinations, made in this way, agree with those made with a calibrated scanning electron microscope (SEM) to within the uncertainty of the instrument. The electrical cross-sectional area of metal lines can be determined by making resistance measurements at two temperatures.","PeriodicalId":164872,"journal":{"name":"Proceedings of 1994 IEEE International Integrated Reliability Workshop (IRWS)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1994-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"An electrical method for determining the thickness of metal films and the cross-sectional area of metal lines\",\"authors\":\"H. Schafft, S. Mayo, S. Jones, J. Suehle\",\"doi\":\"10.1109/IRWS.1994.515820\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The electrical thickness of an aluminum-alloy metallization can be determined from resistance measurements of a van der Pauw cross structure at two temperatures, with corrections for the deviation from Matthiessen's rule and for thermal expansion. Thickness determinations, made in this way, agree with those made with a calibrated scanning electron microscope (SEM) to within the uncertainty of the instrument. The electrical cross-sectional area of metal lines can be determined by making resistance measurements at two temperatures.\",\"PeriodicalId\":164872,\"journal\":{\"name\":\"Proceedings of 1994 IEEE International Integrated Reliability Workshop (IRWS)\",\"volume\":\"16 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1994-10-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of 1994 IEEE International Integrated Reliability Workshop (IRWS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IRWS.1994.515820\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of 1994 IEEE International Integrated Reliability Workshop (IRWS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IRWS.1994.515820","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
An electrical method for determining the thickness of metal films and the cross-sectional area of metal lines
The electrical thickness of an aluminum-alloy metallization can be determined from resistance measurements of a van der Pauw cross structure at two temperatures, with corrections for the deviation from Matthiessen's rule and for thermal expansion. Thickness determinations, made in this way, agree with those made with a calibrated scanning electron microscope (SEM) to within the uncertainty of the instrument. The electrical cross-sectional area of metal lines can be determined by making resistance measurements at two temperatures.
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