电迁移故障的分布

D. Lacombe, Earl L. Parks
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引用次数: 49

摘要

本文给出了对电迁移试验失效统计分布的评估结果。进行了大型寿命试验,并确定了不同长度和宽度线的失效分布性质。在所有情况下,分布都是对数正态分布,直到至少0.3%的故障点。讨论了这些结果的可能原因及其对设计具有成本效益的电迁移测试程序的影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The Distribution of Electromigration Failures
This paper presents the results of an evaluation of the statistical distribution of electromigration test failures. Large scale life tests were carried out and the natujre of the failure distributions were determined for lines of varying length and width. In all cases, the distribution were found to be log-normal down to at least the 0.3% failure point. Possible reasons for these results and their implications with regard to the design of a cost effective electromigration testing program are discussed.
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