挤压铸造法制备高密度Mo/Cu复合材料的热物理性能

Guo-qin Chen, Gaohui Wu, D. Zhu, Qiang Zhang
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引用次数: 6

摘要

为了在半导体领域的应用,散热器材料的热膨胀系数必须接近半导体芯片和外围材料的热膨胀系数。此外,还需要高导热性和致密性。Mo/Cu复合材料具有低热膨胀系数和高导热性,是热管理应用的理想选择。本文采用高性价比的挤压铸造技术制备了体积分数为55% /spl sim/ 67% Mo的Mo/Cu复合材料。研究了Mo/Cu复合材料的显微组织和热物理性能。实验结果表明:(1)获得了Mo/Cu复合材料的全密度,Mo/Cu复合材料的微观结构为黏着相Cu连接Mo晶粒的均匀复合结构。(2) Mo/Cu复合材料的平均热膨胀线性系数(20 /spl°C /spl sim/ 100/spl°C)在7.9 ~ 9.3 /spl次/ 10/sup ~ 6// spl°C之间,随Mo体积分数的增加而减小。热膨胀实验系数与基于Kerner模型的预测值吻合较好。(3)导热系数随Cu含量体积分数的增加而增加,最高可达220 ~ 270 W/(m/spl中点//spl度/C)。这是由于Mo/Cu复合材料的全密度和高纯度是通过经济高效的挤压铸造技术工艺实现的。因此,Mo/Cu复合材料的性能足以满足电子封装的应用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The thermo-physical properties of high dense Mo/Cu composites fabricated by squeeze casting technology
For applicability in the field of semiconductor, it is important that the thermal expansion coefficient of heat sink materials approximates to those of semiconductor chip and peripheral material. In addition, high thermal conductivity and densification also is required. Mo/Cu composites are desirable for thermal management applications because of its combination of low thermal expansion coefficient and high thermal conductivity. In this paper, Mo/Cu composites with volume fractions of 55% /spl sim/ 67% Mo content have been fabricated by the cost-effective squeeze-casting technology. The microstructures and thermo-physical properties of the Mo/Cu composites were investigated. The experimental results showed that: (1) the full densities of the Mo/Cu composites were achieved and the microstructures of the Mo/Cu composites were homogenous compound structures of adhesive phase Cu linking Mo grains. (2) The mean linear coefficients of thermal expansion (20 /spl deg/C /spl sim/ 100/spl deg/C) of Mo/Cu composites ranged from 7.9 to 9.3 /spl times/ 10/sup -6// /spl deg/C and decreased with an increase in volume fraction of Mo content. The experimental coefficients of thermal expansion agreed well with predicted values based on Kerner's model. (3) Their thermal conductivities were increased with the increasing of volume fraction of Cu content and as high as 220-270 W/(m/spl middot//spl deg/C). This was attributed to the fact that the full densities and high purity of Mo/Cu composites were achieved through the cost-effective squeeze-casting technology processes. As a result, the properties of the Mo/Cu composites are good enough to satisfy electronic packaging applications.
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