微纳米系统集成——下一个前沿

2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) Pub Date : 2017-05-01 DOI:10.23919/LTB-3D.2017.7947411

M. Howlader

{"title":"微纳米系统集成——下一个前沿","authors":"M. Howlader","doi":"10.23919/LTB-3D.2017.7947411","DOIUrl":null,"url":null,"abstract":"We overview heterogeneous integration technologies for micro- and nano-systems that allow for interaction with people and the environment. Some applications of the surface activated nanobonding, and sensors development to create an integrated water quality monitoring system will be discussed.","PeriodicalId":183993,"journal":{"name":"2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)","volume":"7 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Micro- and nano-systems integration — The next frontier\",\"authors\":\"M. Howlader\",\"doi\":\"10.23919/LTB-3D.2017.7947411\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We overview heterogeneous integration technologies for micro- and nano-systems that allow for interaction with people and the environment. Some applications of the surface activated nanobonding, and sensors development to create an integrated water quality monitoring system will be discussed.\",\"PeriodicalId\":183993,\"journal\":{\"name\":\"2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)\",\"volume\":\"7 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-05-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.23919/LTB-3D.2017.7947411\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.23919/LTB-3D.2017.7947411","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

我们概述了允许与人和环境交互的微和纳米系统的异构集成技术。将讨论表面活化纳米键合的一些应用，以及传感器的发展，以创建一个集成的水质监测系统。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Micro- and nano-systems integration — The next frontier

We overview heterogeneous integration technologies for micro- and nano-systems that allow for interaction with people and the environment. Some applications of the surface activated nanobonding, and sensors development to create an integrated water quality monitoring system will be discussed.

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2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)

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