负栅极偏压非晶硅薄膜晶体管的漏极偏压应力诱导退化

Dapeng Zhou, Mingxiang Wang, Xiaowei Lu, Jieyun Zhou
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引用次数: 0

摘要

本研究研究了非晶硅薄膜晶体管(a-Si TFTs)在固定负栅偏压(Vg)的漏极偏压(Vd)应力下的劣化。对于直流Vd应力,对于较大的负Vgd (Vg−Vd),状态产生机制主导阈值电压(Vth)退化,而对于正Vgd,状态产生和/或电子捕获机制主导。对于交流Vd应力,状态产生、电子捕获和空穴捕获有助于降解。主导机制取决于应力时间、频率和Vgd极性。降低应力电压抑制了−Vgd条件下的状态产生和/或空穴捕获,但增强了+Vgd条件下的状态产生和/或电子捕获。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Drain bias stress-induced degradation in amorphous silicon thin film transistors with negative gate bias
In this study, degradation of amorphous silicon thin film transistors (a-Si TFTs) under drain bias (Vd) stresses with fixed negative gate bias (Vg) has been investigated. For DC Vd stress, state creation mechanism dominates the threshold voltage (Vth) degradation for relative large negative Vgd (Vg−Vd) while state creation and/or electron trapping dominates for positive Vgd. For AC Vd stress, state creation, electron trapping and hole trapping contribute to the degradation. Dominant mechanism depends on stress time, frequency and the polarity of Vgd. Decreasing stress voltage suppresses state creation and/or hole trapping for −Vgd condition, but enhances state creation and/or electron trapping for +Vgd condition.
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