天然氧化MgO势垒磁隧道结的可靠性研究

C. Yoshida, T. Sugii
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引用次数: 21

摘要

我们使用时间相关介质击穿(TDDB)技术检测了自然氧化MgO屏障的击穿特性。我们发现击穿时间的正偏倚依赖可以用e模型解释,负偏倚依赖可以用幂律模型解释。氧化MgO势垒的这种不对称性质是由于参考/势垒界面上未氧化的Mg金属。我们还通过考虑焦耳热效应估计了脉冲电压应力下的寿命膨胀。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Reliability study of magnetic tunnel junction with naturally oxidized MgO barrier
We examined the breakdown characteristics of naturally oxidized MgO barriers using a time dependent dielectric breakdown (TDDB) technique. We found that the positive bias dependence of the breakdown time can be explained using the E-model and negative bias dependence can be explained using the power-law model. This asymmetric nature of the oxidized MgO barrier was due to unoxidized Mg metal at the reference/barrier interface. We also estimated the lifetime expansion under pulse voltage stress by taking the Joule heating effects into account.
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