用于无源无线压力监测的新型电磁换能式微传感器概念

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI:10.1109/SENSOR.2009.5285739

M. Jatlaoui, F. Chebila, I. Gmati, P. Pons, H. Aubert

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引用次数: 20

摘要

在本文中，我们提出了一种新的基于电磁转导原理的方法，可用于远距离覆盖压力测量。作者之前报道的工作已经验证了400µm硅膜厚度和膜垂直位移均匀假设下的电磁转导原理[1-2]。在这个新的报告中，我们研究了硅膜厚度对电磁转导灵敏度的影响。此外，还报道了考虑硅膜在压力作用下实际挠度的全无源无线监测压力微传感器。这种通信仅集中在压力测量单元上。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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New electromagnetic transduction micro-sensor concept for passive wireless pressure monitoring application

In this communication we present a new and different approach based on electromagnetic transduction principle, which can be used for long distance covering pressure measurement. Previous work reported by the authors has validated the principle of the electromagnetic transduction for 400µm silicon membrane thickness and with the hypothesis of uniform vertical membrane displacement [1–2]. In this new report we investigate the effect of the silicon membrane thickness on electromagnetic transduction sensitivity. Moreover the completely passive wireless monitoring pressure micro-sensor is reported by taking into account the real deflection of the silicon membrane under pressure. This communication is focused only on the pressure measurement cell.

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TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

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