{"title":"悬臂式MEMS开关的优化","authors":"M. Vakilian, M. Mousavi, B. Bais, B. Majlis","doi":"10.1109/SMELEC.2012.6417116","DOIUrl":null,"url":null,"abstract":"In this paper, RF MEMS switches were studied. One of the applications of RF MEMS switches is in the reconfigurable antenna where it is used to replace the traditional switches such as FET and PIN switches. Among the RF MEMS switches, the cantilever-based MEMS switch is the most popular for its low cost and ease of the fabrication process. The 3D builder and Thermo-Electro-Mechanical (TEM) modules of the IntelliSuite software were used for the simulation of the cantilever-based MEMS switch. The effect of materials and beam geometry of the switch on the pull in voltage and the operating frequency were discussed. The simulation results showed that there is a trade-off between the pull in voltage and the operating frequency for optimizing the cantilever-based MEMS switch.","PeriodicalId":210558,"journal":{"name":"2012 10th IEEE International Conference on Semiconductor Electronics (ICSE)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"10","resultStr":"{\"title\":\"Optimization of cantilever-based MEMS switch\",\"authors\":\"M. Vakilian, M. Mousavi, B. Bais, B. Majlis\",\"doi\":\"10.1109/SMELEC.2012.6417116\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, RF MEMS switches were studied. One of the applications of RF MEMS switches is in the reconfigurable antenna where it is used to replace the traditional switches such as FET and PIN switches. Among the RF MEMS switches, the cantilever-based MEMS switch is the most popular for its low cost and ease of the fabrication process. The 3D builder and Thermo-Electro-Mechanical (TEM) modules of the IntelliSuite software were used for the simulation of the cantilever-based MEMS switch. The effect of materials and beam geometry of the switch on the pull in voltage and the operating frequency were discussed. The simulation results showed that there is a trade-off between the pull in voltage and the operating frequency for optimizing the cantilever-based MEMS switch.\",\"PeriodicalId\":210558,\"journal\":{\"name\":\"2012 10th IEEE International Conference on Semiconductor Electronics (ICSE)\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-09-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"10\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2012 10th IEEE International Conference on Semiconductor Electronics (ICSE)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SMELEC.2012.6417116\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 10th IEEE International Conference on Semiconductor Electronics (ICSE)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMELEC.2012.6417116","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
In this paper, RF MEMS switches were studied. One of the applications of RF MEMS switches is in the reconfigurable antenna where it is used to replace the traditional switches such as FET and PIN switches. Among the RF MEMS switches, the cantilever-based MEMS switch is the most popular for its low cost and ease of the fabrication process. The 3D builder and Thermo-Electro-Mechanical (TEM) modules of the IntelliSuite software were used for the simulation of the cantilever-based MEMS switch. The effect of materials and beam geometry of the switch on the pull in voltage and the operating frequency were discussed. The simulation results showed that there is a trade-off between the pull in voltage and the operating frequency for optimizing the cantilever-based MEMS switch.
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