利用多域表面积分公式提取衬底电阻

International Conference on Simulation of Semiconductor Processes and Devices, 2003. SISPAD 2003. Pub Date : 2003-09-29 DOI:10.1109/SISPAD.2003.1233702

A. Vithayathil, Xin Hu, J. White

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引用次数: 6

摘要

为了评估和优化布局策略，以最大限度地减少衬底噪声，有必要有快速和准确的技术来计算与衬底相关的接触耦合电阻。在本文中，我们描述了一种能够全芯片分析的提取方法，该方法结合了适度几何近似，新颖的积分公式和fft加速的预置迭代方法。

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Substrate resistance extraction using a multi-domain surface integral formulation

In order to assess and optimize layout strategies for minimizing substrate noise, it is necessary to have fast and accurate techniques for computing contact coupling resistances associated with the substrate. In this paper, we describe an extraction method capable of full-chip analysis which combines modest geometric approximations, a novel integral formulation, and an FFT-accelerated preconditioned iterative method.

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来源期刊

International Conference on Simulation of Semiconductor Processes and Devices, 2003. SISPAD 2003.

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