用于微/纳米测量的二维角传感器

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2007-04-23 DOI:10.1109/NEMS.2007.352025

Qinggang Liu, Yiping Li, Wenbing Zhao, Xiaotang Hu

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引用次数: 1

摘要

介绍了一种用于微角测量和纳米尺度测量的光学非接触紧凑二维角传感器。光束从角度传感器发射到微目标，然后被反射回传感器。角度传感器是基于光学微分法设计的，采用两个正交的光学内反射临界角棱镜。采用微处理器控制单元(MCU)完成信号的采集、处理、显示、通信和上位机控制信号的输出。当测量范围设置为±600arcsec时，测量分辨率优于0.05arcsec。此外，该传感器具有分辨率/范围可调的优点，可以同步测量二维角位移。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Two Dimensions Angular Sensor for Micro/Nano Measurement

An optical non-contact and compact two dimensions angular sensor for micro angle measurement and nanometer scale measurement is introduced in the paper. The light beam emits from the angular sensor to the micro target and then is reflected back into the sensor. The angular sensor is designed based on optical differential method which adopts two orthogonal optical inner-reflection critical angle prisms. A microprocessor control unit (MCU) is used to carry out the signals' collection, processing, display, communication and control signal's output via upper computer. The measurement resolution is better than 0.05arcsec when the measurement range is set to be plusmn 600arcsec. Moreover, the sensor has the merits of adjustable resolution/range and can measure two dimensional angular displacements synchronously.

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2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

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