含孔洞样夹杂的共晶合金热界面材料的热特性

Xuejiao Hu, Linan Jiang, K. Goodson
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引用次数: 23

摘要

空洞的形成和生长是焊接界面材料的主要问题,因为它们阻碍了半导体电子器件中从硅晶片到散热器/散热器的热传导。这项工作使用红外显微镜通过硅晶片测量界面层上的温度分布。在器件功率密度高于50 W/cm/sup /时,在类空洞夹杂物的顶部发现热点,其温度高于平均模具温度15 /spl℃。该技术的理论空间分辨率为3-5/spl mu/m,有望用于界面焊料层中空洞的热表征。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Thermal characterization of eutectic alloy thermal interface materials with void-like inclusions
Void formation and growth is a major problem for solder interface materials, because they impede heat conduction from the silicon die to heat spreader/heat sink in semiconductor electronic devices. This work uses infrared microscopy to measure temperature distributions on the interfacial layer through the silicon die. Hot spots, with a 15 /spl deg/C temperature rise above average die temperature, are found right on top of void-like inclusions at a device power density above 50 W/cm/sup 2/. The technique presented in the manuscript, with a theoretical spatial resolution of 3-5/spl mu/m, is promising for thermal characterization of voids in interface solder layers.
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