阻抗场法随机掺杂波动建模

International Conference on Simulation of Semiconductor Processes and Devices, 2003. SISPAD 2003. Pub Date : 2003-09-29 DOI:10.1109/SISPAD.2003.1233645

A. Wettstein, O. Penzin, Eugeny Lyumkis, Wolfgang Fichtner

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引用次数: 57

摘要

我们讨论了一种基于阻抗场方法的随机掺杂波动建模方法，该方法最近已集成到DESSIS中。该方法易于使用，比统计方法效率高几个数量级。

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Random dopant fluctuation modelling with the impedance field method

We discuss an approach for the modelling of random dopant fluctuations based on the impedance field method that has been recently integrated into DESSIS. The method is easy to use and orders of magnitudes more efficient than the statistical method.

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来源期刊

International Conference on Simulation of Semiconductor Processes and Devices, 2003. SISPAD 2003.

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