微机械管式硅液滴发生器

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI:10.1109/SENSOR.2009.5285483

H. Hida, N. Inagaki, M. Koyama, M. Shikida, K. Sato

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引用次数: 2

摘要

我们开发了一种新型的生物化学反应液滴发生器，并考虑了雷诺数和韦伯数。采用深度反应离子刻蚀法将硅液滴发生器制作在绝缘体上的硅晶片上，通过加热热缩管将其固定在热缩管内。实验证实，所制备的液滴发生器能够喷射形成直径为1mm的液滴。

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Micromachined tube-type of Si droplet generator

We developed the novel type of droplet generator for the bio-chemical reactions, and designed it by considering Reynolds and Weber numbers. The Si droplet generator was fabricated on a silicon-on-insulator wafer by using deep-reactive ion etching and was fixed in a piece of heat-shrinkable tubing by heating the tubing. We experimentally confirmed that the fabricated droplet generator formed droplets in 1 mm diameter with jetting.

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TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

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