全面研究,成功探索GaN晶圆技术

Tang Mee Sean
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引用次数: 0

摘要

基于硅衬底的功率MOSFET晶圆在性能和成本上都面临瓶颈。业界普遍预测下一代晶圆将来自氮化镓衬底。这种新材料几乎在所有方面都具有竞争力,预计将成为主导技术。许多高功率器件供应商正在进行深入的努力,希望比所有其他竞争对手更早进入市场。实现这一目标的挑战包括面临一些最奇怪的问题。GaN HEMT晶圆面临的问题之一是无法执行适当的测试,因为它是一个正常的器件。为了在进入装配封装前确定器件的质量,在突破性探测工艺方面投入了大量的精力。在开发健壮的探测方法的过程中,有许多质量事件和关注点。执行了多轮评估,最终获得了几个鲁棒性选项。经过实际验证,选择了一种新的改进探测方法。它可以提供合理可靠的测量性能,同时得出新的电路应该在晶圆级重新设计的结论。通过这种新的探测方法,上市时间可以达到非常好的性能,从而在市场渗透方面具有竞争优势。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Comprehensive study to enable successful probing of GaN wafer technology
The power MOSFET wafers which base on silicon substrates are almost reaching end of road, lacking on both performance and cost. It was widely predicted in the industry that next generation wafers should come from Gallium Nitride (GaN) substrate. This new material is expected to be the dominant technology due to its competitive in almost all aspects. Many high power device providers are making deep dive efforts, hopefully to penetrate market earlier than all other competitors. The challenges in achieving that target include facing some of the strangest issues. One of the issues faced in GaN HEMT wafer is not able to perform proper testing as it is a normally-on device. A lot of efforts were invested into developing breakthrough probing process in order to determine quality of device before going into assembly packaging. In the process to develop robust probing methodology, there were many quality occurrences and concerns. Multiple rounds of evaluations were executed and finally obtained few robust options. Upon actual verifications, a new improved probing methodology was selected. It could provide reasonable and reliable measuring performance while concluding new circuits should be redesigned at wafer level. With this new probing method, time to market could reach extremely good performance, enabling competitive advantage in market penetration.
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