在空气和还原气氛中制备ti掺杂氧化铝晶界的原子结构

2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) Pub Date : 2017-05-01 DOI:10.23919/LTB-3D.2017.7947475

S. Ishihara, E. Tochigi, N. Shibata, Y. Ikuhara

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引用次数: 0

摘要

在空气和Ar-H2混合气体中制备了两种掺杂钛的a-氧化铝双晶。采用透射电子显微镜(TEM)和扫描电子显微镜(STEM)研究了双晶的晶界。详细报道了它们的原子结构。

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Atomic structure of Ti-doped alumina grain boundaries fabricated in air and reducing atmosphere

Two a-alumina bicrystals doped with titanium were fabricated in different atmospheres: air and Ar-H2 mixed gas. The grain boundaries (GBs) of the bicrystals were investigated by transmission electron microscopy (TEM) and scanning TEM (STEM). Their atomic structures are reported in detail.

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2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)

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