金属有机化学气相沉积法制备III-V型纳米线及其异质结构

H. Joyce, Y. Kim, Q. Gao, H. Tan, C. Jagadish
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摘要

本文研究了金属有机化学气相沉积法制备的III-V型纳米线以及轴向和径向异质纳米线的结构和光学性能。除了二元纳米线,如GaAs、InAs和InP外,我们还展示了三元InGaAs和AlGaAs纳米线。由GaAs核心和AlGaAs壳层组成的核壳纳米线,以及由AlGaAs和GaAs壳层交替组成的核多壳纳米线,表现出较强的光致发光性能。InGaAs的轴向段被整合到GaAs纳米线中,形成GaAs/InGaAs纳米线超晶格。我们已经开发了一种双温度生长程序来优化纳米线的形态。初始高温步骤促进直(111)b取向纳米线的成核和外延生长。随后采用较低的温度,以尽量减少径向增长。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Growth of III-V Nanowires and Nanowire Heterostructures by Metalorganic Chemical Vapor Deposition
We have investigated the structural and optical properties of III-V nanowires, and axial and radial nanowire heterostructures, fabricated by metalorganic chemical vapor deposition. In addition to binary nanowires, such as GaAs, InAs, and InP, we have demonstrated ternary InGaAs and AlGaAs nanowires. Core-shell nanowires consisting of GaAs cores with AlGaAs shells, and core-multishell nanowires with alternating shells of AlGaAs and GaAs, exhibit strong photoluminescence. Axial segments of InGaAs have been incorporated within GaAs nanowires to form GaAs/InGaAs nanowire superlattices. We have developed a two-temperature growth procedure to optimize nanowire morphology. An initial high temperature step promotes nucleation and epitaxial growth of straight (111)B-oriented nanowires. Lower temperatures are employed subsequently, to minimise radial growth.
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