{"title":"阵列诊断监视器——一种DRAM技术开发工具","authors":"M. Paggi, E. Sprogis, G. Richard, R. Newhart","doi":"10.1109/ICMTS.1990.67897","DOIUrl":null,"url":null,"abstract":"An array diagnostic monitor (ADM) is described which is useful in the early stages of dynamic random access memory (DRAM) technology development. The ADM's unique feature is that it has key diagnostic capabilities designed in parallel with full AC testability. This enables the monitor to be used for defect identification and diagnostic, electrical cell characterization, and process line monitoring. The value of the ADM is demonstrated in early defect detection before sufficient quality hardware is available and in providing rapid feedback to the process development line.<<ETX>>","PeriodicalId":196449,"journal":{"name":"International Conference on Microelectronic Test Structures","volume":"50 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1990-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"8","resultStr":"{\"title\":\"Array diagnostic monitor-a DRAM technology development vehicle\",\"authors\":\"M. Paggi, E. Sprogis, G. Richard, R. Newhart\",\"doi\":\"10.1109/ICMTS.1990.67897\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"An array diagnostic monitor (ADM) is described which is useful in the early stages of dynamic random access memory (DRAM) technology development. The ADM's unique feature is that it has key diagnostic capabilities designed in parallel with full AC testability. This enables the monitor to be used for defect identification and diagnostic, electrical cell characterization, and process line monitoring. The value of the ADM is demonstrated in early defect detection before sufficient quality hardware is available and in providing rapid feedback to the process development line.<<ETX>>\",\"PeriodicalId\":196449,\"journal\":{\"name\":\"International Conference on Microelectronic Test Structures\",\"volume\":\"50 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1990-03-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"8\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Conference on Microelectronic Test Structures\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICMTS.1990.67897\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Conference on Microelectronic Test Structures","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMTS.1990.67897","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Array diagnostic monitor-a DRAM technology development vehicle
An array diagnostic monitor (ADM) is described which is useful in the early stages of dynamic random access memory (DRAM) technology development. The ADM's unique feature is that it has key diagnostic capabilities designed in parallel with full AC testability. This enables the monitor to be used for defect identification and diagnostic, electrical cell characterization, and process line monitoring. The value of the ADM is demonstrated in early defect detection before sufficient quality hardware is available and in providing rapid feedback to the process development line.<>
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