Seppe Van Dyck, Kiumars Aryana, W. Devulder, P. Hopkins, P. Geiregat, C. Detavernier
{"title":"用Sb2Te3/TiTe2超晶格改变相变存储器的表面","authors":"Seppe Van Dyck, Kiumars Aryana, W. Devulder, P. Hopkins, P. Geiregat, C. Detavernier","doi":"10.1109/IITC/MAM57687.2023.10154782","DOIUrl":null,"url":null,"abstract":"As the research on phase change memory (PCM) gains more momentum due to a growing range of possible applications, some issues with their implementation still remain. Two of these issues, slow crystallization and energy loss due to heat diffusion, can be tackled by creating a chalcogenide superlattice. This structure consists of alternating layers of phase change material and a confinement material. To gain a deeper understanding of the effect of this structure on the PCM properties, the Sb2Te3/TiTe2 superlattice is studied as a stepping stone to other confinement materials. In situ X-ray diffraction is used to evaluate the deposition and the thermal stability of these materials. To study the heatflow in this structure, time-domain thermoreflectance (TDTR) is used. Finally, a methodology is presented to evaluate the functional effect of the superlattice using optical switching.","PeriodicalId":241835,"journal":{"name":"2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM)","volume":"4 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Changing the Face of Phase Change Memory with Sb2Te3/TiTe2 Superlattices\",\"authors\":\"Seppe Van Dyck, Kiumars Aryana, W. Devulder, P. Hopkins, P. Geiregat, C. Detavernier\",\"doi\":\"10.1109/IITC/MAM57687.2023.10154782\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"As the research on phase change memory (PCM) gains more momentum due to a growing range of possible applications, some issues with their implementation still remain. Two of these issues, slow crystallization and energy loss due to heat diffusion, can be tackled by creating a chalcogenide superlattice. This structure consists of alternating layers of phase change material and a confinement material. To gain a deeper understanding of the effect of this structure on the PCM properties, the Sb2Te3/TiTe2 superlattice is studied as a stepping stone to other confinement materials. In situ X-ray diffraction is used to evaluate the deposition and the thermal stability of these materials. To study the heatflow in this structure, time-domain thermoreflectance (TDTR) is used. Finally, a methodology is presented to evaluate the functional effect of the superlattice using optical switching.\",\"PeriodicalId\":241835,\"journal\":{\"name\":\"2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM)\",\"volume\":\"4 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-05-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IITC/MAM57687.2023.10154782\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IITC/MAM57687.2023.10154782","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Changing the Face of Phase Change Memory with Sb2Te3/TiTe2 Superlattices
As the research on phase change memory (PCM) gains more momentum due to a growing range of possible applications, some issues with their implementation still remain. Two of these issues, slow crystallization and energy loss due to heat diffusion, can be tackled by creating a chalcogenide superlattice. This structure consists of alternating layers of phase change material and a confinement material. To gain a deeper understanding of the effect of this structure on the PCM properties, the Sb2Te3/TiTe2 superlattice is studied as a stepping stone to other confinement materials. In situ X-ray diffraction is used to evaluate the deposition and the thermal stability of these materials. To study the heatflow in this structure, time-domain thermoreflectance (TDTR) is used. Finally, a methodology is presented to evaluate the functional effect of the superlattice using optical switching.