2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM)

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2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM) - 最新文献

Integrating 8nm Self-Aligned Tip-to-Tip to Enable 4-track Standard Cell Architecture as Scaling Booster

Pub Date : 2023-05-01 DOI: 10.1109/IITC/MAM57687.2023.10154710 P. Marien, V. V. Gonzalez, S. Choudhury, D. Radisic, S. Decoster, S. Kundu, Y. Hermans, B. Kenens, H. De Coster, E. Sanchez, A. Peter, A. S. Marquez, N. Jourdan, D. Batuk, J. Ryckaert, G. Murdoch, S. Park, Z. Tokei

Automatic Detection of Via Arrays in AFM Images for CMP Dishing Evaluation

Pub Date : 2023-05-01 DOI: 10.1109/IITC/MAM57687.2023.10154637 A. Zienert, Jan Langer, Doreen Hensel, L. Hofmann, K. Gottfried, J. Schuster

Improving uniformity of 3-level High Aspect Ratio Supervias

Pub Date : 2023-05-01 DOI: 10.1109/IITC/MAM57687.2023.10154787 D. Montero, P. Marien, Y. Hermans, V. Vega-Gonzalez, Y. Feurprier, N. Oikawa, N. Buccheri, C. Wu, G. Martinez, D. Batuk, H. Puliyalil, S. Decoster, K. Kumar, F. Lazzarino, G. Murdoch, S. Park, Z. Tokei

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