利用室温键合技术制造多片堆叠的偏移补偿波长转换器件

2014 4th IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) Pub Date : 2014-07-15 DOI:10.1109/LTB-3D.2014.6886158

Yoshimi Ariga, T. Onda, Waka Kubota, I. Shoji

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摘要

我们利用室温键合技术研制了一种新型的β-BaB2O4层叠板结构波长转换器件。当使用较薄的光板时，输出光束质量得到改善，而产生的紫外线功率降低。

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Fabrication of walk-off compensating wavelength-conversion devices with stacks of multiple plates by use of room-temperature bonding

We have developed new structured wavelength-conversion devices with stacked plates of β-BaB₂O₄ using the room-temperature bonding technique. The output beam quality is improved, while the generated UV power becomes lower when thinner plates are used.

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2014 4th IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)

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