RTP光管辐射温度计标定试验台的建模与实验结果

12th IEEE International Conference on Advanced Thermal Processing of Semiconductors, 2004. RTP 2004. Pub Date : 2004-09-28 DOI:10.1109/RTP.2004.1441961

K. Ball, J. Howell

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引用次数: 8

摘要

构建了用于RTP工具的光管温度计和热电偶测量硅片的测试、分析和校准的测温试验台，并将测量硅片上的温度分布与光管辐射温度计测量结果进行了比较。利用蒙特卡罗模拟技术对实验室进行了详细的建模，包括测量的镜面/漫射表面特性，并将模型的预测结果与测量结果进行了比较。该室目前正在进行修改，以测试先进的温度测量技术，也描述了

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Modeling and experimental results for an RTP light-pipe radiation thermometer calibration testbed

A thermometry testbed designed for the testing, analysis, and calibration of light pipe thermometers and thermocouple-instrumented silicon wafers used in RTP tools has been constructed, and comparison of measured wafer temperature distributions on the instrumented wafers with light-pipe radiation thermometer measurements have been carried out. The test chamber has been modeled using detailed Monte Carlo simulation including measured specular/diffuse surface properties, and predictions of the model have been compared with measured results and are presented. The chamber is presently being modified to test advanced temperature measurement techniques, which are also described

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来源期刊

12th IEEE International Conference on Advanced Thermal Processing of Semiconductors, 2004. RTP 2004.

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