无铅回流曲线参数对倒装芯片成品率、可靠性和金属间化合物特性的敏感性分析

Zhaozhi Li, Sangil Lee, B. Lewis, P. Houston, D. Baldwin, G. Stout, T. Tessier, John L. Evans
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引用次数: 10

摘要

倒装芯片工艺的优势在于其成本低、间距小、外形尺寸小,并且可以很好地适应传统的表面贴装技术(SMT)工艺,事实上,回流焊通常用于形成焊点。随着无铅焊料的使用在今天被立法,了解回流工艺条件对倒装芯片焊点形成的影响至关重要,这样可以更好地控制倒装芯片的组装过程。本文对倒装芯片无铅回流曲线参数对硅组装焊点形成特性及可靠性性能的影响进行了全面的实验研究。研究的回流参数包括浸泡时间、峰值温度和高于液相线的时间。对每个回流参数的三个层次进行了研究。采用响应面法(RSM)进行试验设计,探讨了实验参数的二次效应。研究结果包括封装成品率、封装抗剪强度、金属间化合物厚度以及封装可靠性性能。研究结果表明,硅封装上的细间距倒装芯片在氮气环境下回流时,具有较宽的回流工艺窗口,可实现100%的成品率。当包装在空气中回流时,发现了产量损失。通过对15条回流曲线的研究,发现回流参数对包体抗剪强度的影响并不显著。对于金属间化合物的厚度,发现液相线以上的时间是一个显著的因素,置信水平为99.9%。在2500液对液热冲击可靠性测试中,在不同回流条件下组装的封装之间没有发现统计学差异。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Sensitivity analysis of Pb free reflow profile parameters toward flip chip on silicon assembly yield, reliability and intermetallic compound characteristics
Flip chip process excels due to its low cost, fine pitch, small form factor and its ready-adaptation to the conventional Surface Mount Technology (SMT) process, in the fact that the reflow is often used to form the solder joint. As the use of Pb free solder is legislated today, it is vital to understand the impact of reflow process conditions on the formation of the flip chip solder joint, so that the assembly process of the flip chip can be better controlled. This paper introduces a comprehensive experimental study on the impact of Pb free reflow profile parameters towards flip chip on silicon assembly solder joint formation characteristics as well as the reliability performance. The reflow parameters studied include the soak time, peak temperature and time above liquidus. Three levels of each reflow parameter are investigated. The Response Surface Methodology (RSM) is used for Design of Experiment (DOE) to explore the quadratic effect of the investigated parameters. Results studied include the package assembly yield, package shear strength, intermetallic compound thickness as well as the package reliability performance. Study results show that the fine pitch flip chip on silicon package has a wide reflow process window to achieve 100% yield, if reflowed in a Nitrogen environment. Yield loss was found when the packages are reflowed in air. With the fifteen reflow profiles studied, it was found that the reflow parameters are not significant in terms of the package shear strength. For the intermetallic compound thickness, it was found that the time above liquidus is a significant factor, with a 99.9% confidence level. No statistical difference was found among packages assembled under different reflow conditions up to 2500 liquid to liquid thermal shock reliability testing.
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