使用单掩膜多向光刻技术的无装配3d微加工工艺

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2009-06-21 DOI:10.1109/SENSOR.2009.5285689

T. Suzuki, H. Yamamoto, I. Kanno, M. Washizu, H. Kotera

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引用次数: 1

摘要

在本文中，我们提出了一种新的微加工技术，无需装配过程，包括对准和键合，用于重要的三维微结构和微流体网络。该工艺利用具有短时间内全图像曝光特性的单掩模倾斜/旋转UV光刻技术，将具有自由路径、孔、开口和喷嘴的嵌入式微通道集成为一个复杂的微流控网络。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Assembly-free 3-D microfabrication process using single-mask multidirectional photolithography

In this paper, we propose a novel microfabrication technique without assembling process including alignment and bonding for significant 3-D microstructures and microfludic networks. The proposed process can integrate embedded microchannels with free path, orifices, openings and nozzles into a complicated microfluidic network by using the inclined/rotated UV lithography with a characteristic single-mask of whole image exposure in a short period of time.

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TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

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