利用原子扩散键合和后续激光照射增强铝薄膜晶圆的透光性

2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) Pub Date : 2017-05-01 DOI:10.23919/LTB-3D.2017.7947402

M. Ichikawa, N. Eboshi, T. Kemmochi, M. Sano, T. Mukai, M. Uomoto, T. Shimatsu

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引用次数: 0

摘要

采用原子扩散键合(ADB)方法研究了蓝宝石或合成石英玻璃晶圆与Al薄膜结合后的透光性增强。结果表明，在后续的激光照射下，键合界面处的Al薄膜扩散到晶圆中，从而提高了通过键合界面的透光率。

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Enhancement of light transmittance for wafers bonded with thin Al films using atomic diffusion bonding and subsequent laser irradiation

Enhancement of light transmittance was examined for sapphire or synthetic quartz glass wafers bonded with thin Al films using atomic diffusion bonding (ADB). The results indicate that the thin Al film at the bonded interface diffuses into the wafer by subsequent laser irradiation, which enhances the light transmittance through the bonded interface.

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2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)

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