基于有限元法和网格变形的参数化多电平微机电系统仿真方法

2012 13th International Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems Pub Date : 2012-04-16 DOI:10.1109/ESIME.2012.6191776

V. Kolchuzhin, J. Mehner

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引用次数: 2

摘要

MEMS设计是一项非常具有挑战性的跨学科工作。考虑到物理和系统水平的参数变化，本文讨论了在普通有限元分析中扩展所考虑的影响所需的先进计算方法。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A parametric multilevel MEMS simulation methodology using finite element method and mesh morphing

The MEMS designing is a very challenging and interdisciplinary task. The paper deals with advanced computational methodology required to extend the considered effects within the ordinary FE-analyses taking into account parameter variation at the physic and system levels.

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2012 13th International Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems

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