薄膜覆盖微流控沟槽侧壁制备热电偶

2014 4th IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) Pub Date : 2014-07-15 DOI:10.1109/LTB-3D.2014.6886176

M. Shibata, Takahiro Yamaguchi, S. Kumagai, M. Sasaki

{"title":"薄膜覆盖微流控沟槽侧壁制备热电偶","authors":"M. Shibata, Takahiro Yamaguchi, S. Kumagai, M. Sasaki","doi":"10.1109/LTB-3D.2014.6886176","DOIUrl":null,"url":null,"abstract":"Thermocouples on the trench sidewall fronting on the flow is fabricated by applying 3D photolithography. Without the flow, the thermocouple on the trench sidewall shows the same temperature with that on the wafer top surface apart from the channel. When the hot gas starts to flow, the thermocouple on the sidewall shows the response increasing its open voltage. The local temperature is measured accurately.","PeriodicalId":123514,"journal":{"name":"2014 4th IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-07-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Thermocouples fabricated on microfluidic trench sidewall capped with film\",\"authors\":\"M. Shibata, Takahiro Yamaguchi, S. Kumagai, M. Sasaki\",\"doi\":\"10.1109/LTB-3D.2014.6886176\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Thermocouples on the trench sidewall fronting on the flow is fabricated by applying 3D photolithography. Without the flow, the thermocouple on the trench sidewall shows the same temperature with that on the wafer top surface apart from the channel. When the hot gas starts to flow, the thermocouple on the sidewall shows the response increasing its open voltage. The local temperature is measured accurately.\",\"PeriodicalId\":123514,\"journal\":{\"name\":\"2014 4th IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2014-07-15\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2014 4th IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/LTB-3D.2014.6886176\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 4th IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/LTB-3D.2014.6886176","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

采用三维光刻技术制备了面向气流的沟槽侧壁热电偶。在没有流动的情况下，沟槽侧壁上的热电偶温度与除沟槽外的晶圆顶表面温度相同。当热气体开始流动时，侧壁上的热电偶显示出响应，其打开电压增加。局部温度测量准确。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Thermocouples fabricated on microfluidic trench sidewall capped with film

Thermocouples on the trench sidewall fronting on the flow is fabricated by applying 3D photolithography. Without the flow, the thermocouple on the trench sidewall shows the same temperature with that on the wafer top surface apart from the channel. When the hot gas starts to flow, the thermocouple on the sidewall shows the response increasing its open voltage. The local temperature is measured accurately.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2014 4th IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)

自引率

0.00%

发文量