新型失效分析技术在先进多层CMOS器件中的应用

Yeoh Eng Hong, M. We
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引用次数: 9

摘要

本文的主要重点是利用DFT(可测试性设计)特征、fanin树、汇编代码编程和功能模型仿真作为FA工具的创新故障定位方法。除此之外,还讨论了缺陷定位技术和革命性的背面FA技术。所有这些工具都增强了FA活动并增加了缺陷检测的机会。如果没有这些工具,在微处理器等极其复杂的设备上进行FA将是极其困难的,甚至是不可能的。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The application of novel failure analysis techniques for advanced multi-layered CMOS devices
The major focus of this paper is on innovative fault localisation approaches that make use of DFT (design for testability) features, fanin tree, assembly code programming and functional model simulation as FA tools. Besides these, defect localisation techniques and revolutionary backside FA techniques are discussed. All these tools enhance FA activities and increase the chance of defect detection. Without these tools, FA on extremely complex devices such as microprocessors will be extremely difficult, if not impossible.
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