{"title":"微加工阵列探针卡","authors":"M. Beiley, S. Wong","doi":"10.1109/IEDM.1992.307412","DOIUrl":null,"url":null,"abstract":"A membrane probe card designed for high speed, high pin count testing has been fabricated with conventional IC technology on a silicon wafer and its functionality demonstrated. A novel method of breaking down interfacial oxide, as a replacement for mechanical scrubbing, is proposed and demonstrated. The probe card can consistently provide contact resistance of <2 Omega , has greatly reduced parasitics, is capable of elevated temperature testing, and offers controlled impedance striplines of 50 Omega to the probe tips.<<ETX>>","PeriodicalId":287098,"journal":{"name":"1992 International Technical Digest on Electron Devices Meeting","volume":"37 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":"{\"title\":\"Micro-machined array probe card\",\"authors\":\"M. Beiley, S. Wong\",\"doi\":\"10.1109/IEDM.1992.307412\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A membrane probe card designed for high speed, high pin count testing has been fabricated with conventional IC technology on a silicon wafer and its functionality demonstrated. A novel method of breaking down interfacial oxide, as a replacement for mechanical scrubbing, is proposed and demonstrated. The probe card can consistently provide contact resistance of <2 Omega , has greatly reduced parasitics, is capable of elevated temperature testing, and offers controlled impedance striplines of 50 Omega to the probe tips.<<ETX>>\",\"PeriodicalId\":287098,\"journal\":{\"name\":\"1992 International Technical Digest on Electron Devices Meeting\",\"volume\":\"37 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"6\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"1992 International Technical Digest on Electron Devices Meeting\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IEDM.1992.307412\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"1992 International Technical Digest on Electron Devices Meeting","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IEDM.1992.307412","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A membrane probe card designed for high speed, high pin count testing has been fabricated with conventional IC technology on a silicon wafer and its functionality demonstrated. A novel method of breaking down interfacial oxide, as a replacement for mechanical scrubbing, is proposed and demonstrated. The probe card can consistently provide contact resistance of <2 Omega , has greatly reduced parasitics, is capable of elevated temperature testing, and offers controlled impedance striplines of 50 Omega to the probe tips.<>
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