具有界面保护层的三角形网格适合于扩散模拟

1996 International Conference on Simulation of Semiconductor Processes and Devices. SISPAD '96 (IEEE Cat. No.96TH8095) Pub Date : 1996-09-02 DOI:10.1109/SISPAD.1996.865325

T. Syo, Y. Akiyama, S. Kumashiro, I. Yokota, S. Asada

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引用次数: 2

摘要

提出了一种自动Delaunay划分网格生成方法，可有效地减小界面附近或薄层扩散过程中的数值误差。引入了一种由局部符合材料界面的矩形网格组成的界面保护层。证明了界面保护层的有效性，可以避免由于硼穿透pMOS栅极氧化物而产生的约1 V的人为阈值电压偏移。

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A triangular mesh with the interface protection layer suitable for the diffusion simulation

An automatic Delaunay partitioned mesh generation which is effective in reduction of numerical errors in a diffusion process near the interface or in the thin layer is proposed. An interface protection layer which consists of a rectangular mesh locally conformed to a material interface is introduced. A validity of the interface protection layer for avoiding an artificial threshold voltage shift of about 1 V due to a boron penetration through a pMOS gate oxide is demonstrated.

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来源期刊

1996 International Conference on Simulation of Semiconductor Processes and Devices. SISPAD '96 (IEEE Cat. No.96TH8095)

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