{"title":"用总注入电荷技术表征p沟道mosfet的热载子诱导降解","authors":"D. Huang, E. E. King, L.J. Palkuti","doi":"10.1109/RELPHY.1994.307860","DOIUrl":null,"url":null,"abstract":"A method to evaluate the sensitivity of p-channel MOSFETs to hot-carrier-induced damage by using the total injected charge as the degradation monitor is presented. The advantage of the method is that lifetimes for all devices made with a particular process correlate to the same straight line with respect to the total injected charge with the slope about 1.8. It then becomes easy to compare the hot-carrier sensitivity of p-channel devices made by different process technologies.<<ETX>>","PeriodicalId":276224,"journal":{"name":"Proceedings of 1994 IEEE International Reliability Physics Symposium","volume":"6 4 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1994-04-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Characterization of hot-carrier-induced degradation in p-channel MOSFETs by total injected charge techniques\",\"authors\":\"D. Huang, E. E. King, L.J. Palkuti\",\"doi\":\"10.1109/RELPHY.1994.307860\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A method to evaluate the sensitivity of p-channel MOSFETs to hot-carrier-induced damage by using the total injected charge as the degradation monitor is presented. The advantage of the method is that lifetimes for all devices made with a particular process correlate to the same straight line with respect to the total injected charge with the slope about 1.8. It then becomes easy to compare the hot-carrier sensitivity of p-channel devices made by different process technologies.<<ETX>>\",\"PeriodicalId\":276224,\"journal\":{\"name\":\"Proceedings of 1994 IEEE International Reliability Physics Symposium\",\"volume\":\"6 4 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1994-04-11\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of 1994 IEEE International Reliability Physics Symposium\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/RELPHY.1994.307860\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of 1994 IEEE International Reliability Physics Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/RELPHY.1994.307860","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Characterization of hot-carrier-induced degradation in p-channel MOSFETs by total injected charge techniques
A method to evaluate the sensitivity of p-channel MOSFETs to hot-carrier-induced damage by using the total injected charge as the degradation monitor is presented. The advantage of the method is that lifetimes for all devices made with a particular process correlate to the same straight line with respect to the total injected charge with the slope about 1.8. It then becomes easy to compare the hot-carrier sensitivity of p-channel devices made by different process technologies.<>
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