用于微电子和光电应用的高柔性键合材料和结构

E. Suhir, D. Ingman
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引用次数: 12

摘要

基于开发的解析应力模型,我们证明了在双材料组件(接头)中使用高度柔顺的材料和结构作为粘合层可以导致显著的应力缓解。该模型表明,粘接或焊接组件中的界面剪切应力与界面柔顺度的平方根成反比,而在“传统”双材料组件(以适度柔顺的粘合层为特征)中,界面柔顺度是由粘合层和粘合组件共同决定的。然而,在具有高度柔顺键的组件中,只有粘合材料才能提供高而有利的界面顺应性。我们建议在一个或两个键合组件上制作适当的纳米线阵列(NWA)作为合适的柔性键合。基于开发的预测模型,我们证明了NWA作为柔顺附件的应用可以导致界面柔顺性的显着增加,大约两个数量级。这导致界面剪切应力降低约一个数量级(与使用“传统”粘合剂或焊料的粘合接头相比)。我们建议将新开发的纳米颗粒材料(NPM)的其中一种改性与NWA一起使用或代替NWA,以增加键合层的顺应性。NWA和NPM的适当组合可以提供高度柔顺和高度可靠的粘合材料和结构。在这种情况下,NPM被用作NWA的嵌入材料。由于NPM具有非凡的机械和环境特性,并且与适当的NWA结合使用,可以制作非常高的适应性和高度可靠的键合,我们期望NPM和NWA单独或组合使用,在微型和光电子中使用的各种双材料和多材料组件中找到广泛的应用,远远超出了“高科技”领域
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Highly compliant bonding material and structure for micro- and opto-electronic applications
Based on the developed analytical stress model, we demonstrate that the employment of highly compliant materials and structures as bonding layers in bi-material assemblies (joints) can lead to a significant stress relief. The model indicates that the interfacial shearing stress in an adhesively bonded or a soldered assembly is inversely proportional to the square root of the interfacial compliance, and that in "conventional" bi-material assemblies (characterized by moderately compliant bonding layers), the interfacial compliance is due to both the bonding layer and the bonded components. However, in assemblies with highly compliant bonds, it is the bonding material only that provides the high and favorable interfacial compliance. We suggest that an appropriate nano-wire array (NWA) fabricated on one or both bonded components be used as a suitable compliant bond. Based on the developed predictive model, we demonstrate that the application of the NWA as a compliant attachment can lead to a significant, about two orders of magnitude, increase in the interfacial compliance. This leads to a reduction in the interfacial shearing stress of about an order of magnitude (compared to the bonded joints using "conventional" adhesives or solders). We suggest that one of the modifications of the newly developed nano-particle material (NPM) be used in addition to, or instead of a NWA, to increase the compliance of the bonding layer. A suitable combination of both the NWA and NPM could be employed to provide a highly compliant and a highly reliable bonding material and structure. In this case the NPM is used as an embedding material for the NWA. Since the NPM has extraordinary mechanical and environmental properties, and, in combination with the appropriate NWA, can make an extremely highly compliant and a highly reliable bond, we expect that the NPM and NWA, used independently or in combination, find a wide application in various bi- and multi-material assemblies employed in micro- and optoelectronics, and well beyond the "high-tech" area
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